VT6200 3D Confocal Microscope
Supplied, sold and supported by Petrano Supply Inc. in Canada.
Spinning-disk confocal microscope for sub-nanometre surface metrology with automated stitching.
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Overview
The VT6200 uses a spinning-disk confocal optical system with a 10 mm Z scanning range, 0.1 nm step-height display resolution and step-height repeatability of 12 nm or better. A motorized 200 x 200 mm XY stage, 100 mm motorized Z, Olympus APO and SEMI-APO objectives from 5X to 100X, true-colour imaging and XtremeVision software with automatic stitching and more than 300 ISO/ASME surface parameters (including the ISO 25178 suite) make it a complete surface metrology station. Optional ISO 17025 calibration certificates, on-site installation, commissioning and training are available.
Applications
- Surface roughness and texture (Sa, Sq, Sdr, Spd, Spc)
- Semiconductor and precision manufacturing QC
- Research metrology labs
Key specifications
| Principle | Spinning-disk confocal optical system |
|---|---|
| Series | VT6100 (100 x 100 mm stage) / VT6200 (200 x 200 mm) / VT6300 (300 x 300 mm); VT-X100 integration head |
| Field of view | 120 x 120 μm to 2.4 x 2.4 mm |
| Height accuracy | ±(0.2 + L/100) μm; width accuracy ±2%, repeatability 40 nm |
| Z scanning range | 10 mm |
| Step-height display resolution | 0.1 nm |
| Step-height repeatability | 12 nm or better |
| XY stage | 200 x 200 mm, motorized |
| Objectives | Olympus 5X / 10X / 20X / 50X / 100X (APO, SEMI-APO) |
| Software | XtremeVision with automatic stitching, 300+ ISO/ASME parameters incl. ISO 25178 |
| Options | True-colour imaging, ISO 17025 calibration, installation and training |
Specifications are provided by the manufacturer, are for general information only, may change without notice, and are confirmed at quotation.
Third-party brands are used for identification only unless an authorized relationship is expressly stated.
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