NS200 Stylus Nano Profiler
Supplied, sold and supported by Petrano Supply Inc. in Canada.
Contact stylus profiler for nanometre-scale step height, roughness and contour.
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Overview
The NS200 stylus nano profiler measures step height, surface roughness and contour by contact scanning, complementing optical methods on films, coatings and machined surfaces. An ultra low inertia sensor with a 330 µm or 1050 µm range, an adjustable measuring force of 0.5 to 50 mg and a step height repeatability of 5 Å suit thin films and soft samples, while the motorized 150 x 150 mm X/Y and R-θ stage with a 6 inch vacuum chuck takes wafers up to 200 mm.
Applications
- Thin films and coatings
- Semiconductor process control
Key specifications
| Measurement type | Contact stylus profilometry |
|---|---|
| Measurands | Step height, roughness, contour |
| Sensor | Ultra low inertia LVDC sensor, range 330 µm or 1050 µm (selectable) |
| Step height repeatability | 5 Å (1 µm step, 1σ) |
| Measuring force | 0.5 to 50 mg, adjustable |
| Stylus | Tip radius 2 µm, angle 60°, magnetic mounting |
| Scan length and speed | 55 mm single scan; 2 µm/s to 2 mm/s; up to 12,000 points per scan |
| Sample stage | Motorized X/Y 150 x 150 mm, motorized R-θ 0 to 360°, 6 inch vacuum chuck |
| Sample size | Wafers up to 200 mm (8 inch); sample height up to 50 mm |
| Navigation camera | 5 MP colour, field of view 2.2 x 1.7 mm (NS200); NS200-D adds a side view |
| Size, weight, power | 640 x 650 x 530 mm; 40 kg; AC 100 to 240 V, 50/60 Hz, 200 W |
Specifications are provided by the manufacturer, are for general information only, may change without notice, and are confirmed at quotation.
Third-party brands are used for identification only unless an authorized relationship is expressly stated.
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