Skip to content
Petrano
Nano 3D Optical Surface Profilometers

Nano 3D Optical Surface Profilometers

Supplied, sold and supported by Petrano Supply Inc. in Canada.

Non-contact optical profilometry for 3D surface form and finish.

For a fast quote, include the quantity, delivery city, required date and any tender number.

Overview

Non-contact 3D optical surface profilometers for form, waviness and finish characterization on optics, wafers, MEMS and precision-machined parts.

Applications

  • Optics and wafers
  • MEMS and microstructures

Key specifications

Measurement type Non-contact 3D optical profilometry (white-light interferometry)
Models SuperView W1-Lite / W1 / W1-Ultra / W2 / W3; WX100 / WX100T probes; WT3000 / WT3200 / WT3300 hybrid (interferometry + confocal)
Roughness repeatability Down to 0.005 nm RMS (0.01 nm on W1-Lite and WX probes)
Step-height accuracy 0.3% (0.7% W1-Lite; 0.5% WX probes); repeatability 0.08 to 0.1% 1σ
Field of view 0.98 x 0.98 mm standard (1.1 x 1.1 mm W1-Ultra; 1.2 x 1.2 mm WT series)
XY stage travel 100 x 100 mm to 300 x 300 mm, motorized; tables ø165 to ø400 mm, 10 to 20 kg load
Z-axis travel 50 to 100 mm (10 mm scan stroke on WT hybrids; 10 / 30 mm on WX probes)
Hybrid confocal mode (WT) 10x / 50x confocal objectives; step-height accuracy (0.15 + L/100) μm, repeatability 12 nm
Warranty 1 year manufacturer warranty

Specifications are provided by the manufacturer, are for general information only, may change without notice, and are confirmed at quotation.

Third-party brands are used for identification only unless an authorized relationship is expressly stated.