Nano 3D Optical Surface Profilometers
Supplied, sold and supported by Petrano Supply Inc. in Canada.
Non-contact optical profilometry for 3D surface form and finish.
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Overview
Non-contact 3D optical surface profilometers for form, waviness and finish characterization on optics, wafers, MEMS and precision-machined parts.
Applications
- Optics and wafers
- MEMS and microstructures
Key specifications
| Measurement type | Non-contact 3D optical profilometry (white-light interferometry) |
|---|---|
| Models | SuperView W1-Lite / W1 / W1-Ultra / W2 / W3; WX100 / WX100T probes; WT3000 / WT3200 / WT3300 hybrid (interferometry + confocal) |
| Roughness repeatability | Down to 0.005 nm RMS (0.01 nm on W1-Lite and WX probes) |
| Step-height accuracy | 0.3% (0.7% W1-Lite; 0.5% WX probes); repeatability 0.08 to 0.1% 1σ |
| Field of view | 0.98 x 0.98 mm standard (1.1 x 1.1 mm W1-Ultra; 1.2 x 1.2 mm WT series) |
| XY stage travel | 100 x 100 mm to 300 x 300 mm, motorized; tables ø165 to ø400 mm, 10 to 20 kg load |
| Z-axis travel | 50 to 100 mm (10 mm scan stroke on WT hybrids; 10 / 30 mm on WX probes) |
| Hybrid confocal mode (WT) | 10x / 50x confocal objectives; step-height accuracy (0.15 + L/100) μm, repeatability 12 nm |
| Warranty | 1 year manufacturer warranty |
Specifications are provided by the manufacturer, are for general information only, may change without notice, and are confirmed at quotation.
Third-party brands are used for identification only unless an authorized relationship is expressly stated.
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