Chotest
VT6200
VT6200 3D Confocal Microscope
by Chotest · China
Spinning-disk confocal microscope for sub-nanometre surface metrology with automated stitching.
Overview
The VT6200 uses a spinning-disk confocal optical system with a 10 mm Z scanning range, 0.1 nm step-height display resolution and step-height repeatability of 12 nm or better. A motorized 200 x 200 mm XY stage, 100 mm motorized Z, Olympus APO and SEMI-APO objectives from 5X to 100X, true-colour imaging and XtremeVision software with automatic stitching and more than 300 ISO/ASME surface parameters (including the ISO 25178 suite) make it a complete surface metrology station. Optional ISO 17025 calibration certificates, on-site installation, commissioning and training are available.
Applications
- Surface roughness and texture (Sa, Sq, Sdr, Spd, Spc)
- Semiconductor and precision manufacturing QC
- Research metrology labs
Key specifications
| Principle | Spinning-disk confocal optical system |
|---|---|
| Z scanning range | 10 mm |
| Step-height display resolution | 0.1 nm |
| Step-height repeatability | 12 nm or better |
| XY stage | 200 x 200 mm, motorized |
| Objectives | Olympus 5X / 10X / 20X / 50X / 100X (APO, SEMI-APO) |
| Software | XtremeVision with automatic stitching, 300+ ISO/ASME parameters incl. ISO 25178 |
| Options | True-colour imaging, ISO 17025 calibration, installation and training |
Specifications are provided by the manufacturer, are for general information only, may change without notice, and are confirmed at quotation.
About Chotest
Precision dimensional metrology, from coordinate and optical measuring machines to laser interferometers, laser trackers and surface metrology.
Manufacturer site: www.chotest.com
Third-party brands are used for identification only unless an authorized relationship is expressly stated.
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